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Cleaning of defects is a critical and necessary step in...

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Cleaning of defects is a critical and necessary step in generating a zero-defect mask blank, because defects in the substrate become defects in the multilayer, which ruins the mask blank.

David Krick Quote About Cleaning, Critical, Defects, Generating, Mask: Cleaning Of Defects Is A...

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Cleaning of defects is a critical and necessary step in...

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